Liquid processing method and liquid processing apparatus

ABSTRACT

In a nozzle unit  4  equipped with processing-liquid nozzles  4 A to  4 J, an air layer  73  and a solvent layer  74  for processing liquid are successively formed outside a processing-liquid layer  71  included in the tip of each nozzle  4 A ( 4 B to  4 J). Next, the solvent layer  74  in the nozzle  4 A is thrown out into a drain part  62  of a standby unit  6  and subsequently, the processing liquid is supplied from the nozzle  4 A to the surface of a wafer W, performing a coating process. After completing the coating process, the processing liquid remaining in the nozzle  4 A is sucked and continuously, respective tips of the nozzles  4 A to  4 J are dipped into respective solvents in solvent reservoir  62 A to  62 J, respectively. From this state, by sucking in the nozzle  4 A, there are newly formed, outside the processing layer  71  in the tip of the nozzle  4 A, an air layer  73  and a solvent layer  74 . Thus, in supplying a substrate, such as semiconductor wafer, with a processing liquid by use of a nozzle unit having a plurality of processing-liquid nozzles integrated, it is possible to prevent dryness of the processing liquids in the respective nozzles while preventing the nozzle unit from being large-sized.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to liquid processing method and apparatus forperforming a coating process of processing liquid, such as resistliquid, to a substrate, for example, semiconductor wafer.

2. Background Art

In the manufacturing process for semiconductor devices or LCDsubstrates, a manufacturing technology called “photo lithography” isemployed to form a desired resist pattern on the surface of a substrate.This technique is carried out during a series of processes of: coatingresist liquid on a substrate, for example, semiconductor wafer that willbe referred “wafer” hereinafter; exposing the resist liquid inaccordance with a designated pattern; and developing the substrate afterthe exposure to form a desired pattern on the substrate.

The above coating process of the resist liquid is accomplished by firstdropping the resist liquid onto the substantial center of a wafersupported by e.g. a spin chuck through application nozzles and secondlyrotating the wafer to allow the resist liquid on the surface of thewafer to spread the same liquid from the center of the wafer to theperiphery.

In the coating process, plural kinds of resist liquids may be usedcorresponding to the kinds of base films to be formed beneath the resistfilm, etching selectivities, thickness of the resist film and so on. Ina constitution where coating nozzles are prepared for every resistliquids of different kinds and a common drive arm drives the coatingnozzles between their standby positions and processing positions forapplying the resist liquids, there are required many operative steps bythe common drive arm grasping each of the application nozzles one afteranother and also troublesome tasks by the drive arm positioning theapplication nozzles to the wafer individually. From this point of view,the introduction of an “all-in-one” type coating nozzle unit having aplurality of nozzles built-in is recently contemplated, as shown withreference numeral 1 of FIG. 17 (see Japanese Patent Publication No.3227642).

Meanwhile, since the resist liquid generally includes components of aresist film made of organic materials and a solvent for the components,such as thinner liquid, the resist liquid is easy to evaporate due toits contact with atmosphere. In order to prevent such evaporation of theresist liquid, therefore, there has been conventionally attempted asuck-back operation where the resist liquid is sucked into anapplication nozzle by e.g. approx. 2 mm after applying the resist liquidon a wafer, thereby establishing a condition where it is difficult forthe resist liquid to contact with the atmosphere.

In spite of the above measure, however, the resist liquid has thetendency of evaporating with a passage of time. Therefore, if performingthe coating process with the use of a coating nozzle where apredetermined interval has lapsed since the previous coating, then theresist liquid whose concentration has changed due to its dryness isapplied, so that coating defectiveness is produced. Under such asituation, the coating process is practically carried out after throwingout the resist liquid dragged into the coating nozzles. Additionally,besides the above drainage before coating the resist liquid on a wafer,periodical drainage of the resist liquid in the nozzles has beenperformed in view of maintaining the quality of resist liquid in thenozzles.

We now discuss the coating process with the use of the above-mentionedall-in-one coating nozzle unit 1. Here, it should be noted that a singlenozzle is activated and the other nozzles are not activated during thecoating process. During the coating process, nevertheless, these nozzlesnot in use also move above a wafer W, together with the nozzle in use.Consequently, the resist liquid in the unused nozzles comes into contactwith atmosphere, precipitating its dryness. Therefore, in the structuredisclosed in the above publication No. 3227642, the coating nozzle unit1 is covered with a cover body 11 and additionally, the cover body 11 isfilled up with a thinner liquid 12 in view of preventing dryness of theresist liquid in the nozzle unit 1. In FIG. 17, reference numeral 13denotes holes that are formed in the cover body 11 to discharge theresist liquid from the nozzles, corresponding to the nozzlesrespectively, and reference numeral 14 denotes a lid body for openingthe holes 13 selectively.

However, it should be noted that the above-mentioned nozzle unit 1 islarge-sized due to the installation of the cover body 11 outside thenozzles. If the number of nozzles built in the nozzle unit 1 increases,then it is large-sized furthermore. In spite of filling the interior ofthe cover body 11 with the thinner liquid 12, the actual coating processis carried out under conditions where the thinner liquid 12 isdischarged from the cover body 11. Therefore, since the nozzles not inuse are not blocked off from the atmosphere perfectly, the evaporationof the resist liquid in the nozzles is accelerated in consequence.

Thus, in case of the next coating process with the use of a differentnozzle, the resist liquid in this nozzle has to be discharged in advanceof the coating process. Additionally, as for a less frequently usednozzle, it is required to perform a periodical drainage of the resistliquid in such a nozzle frequently.

In this way, if it is carried out to drain the resist liquid from thenozzle with respect to each application of the coating liquid orperiodically, then such an expensive resist liquid is wasted, so that anincreased consumption of the resist liquid causes the manufacturing costto be elevated. Under a situation, we and our inventors of the presentinvention are considering a method of reducing waste of the resistliquid without draining it with the adoption of a technique disclosed inJapanese Patent Publication (Kokai) No. 2003-178965. According to thetechnique, an air layer and a thinner layer are formed outside theresist liquid in the coating nozzle. That is, by suppressing contact ofthe resist liquid with atmosphere to prevent dryness of the resistliquid, its drainage before the coating process is prevented.

In the above publication No. 2003-178965, however, it is not supposed toapply this technique on an all-in-one type coating nozzle unit equippedwith a plurality of nozzles. Additionally, there is neither descriptionabout a technique of forming the air layers and the thinner layers in aplurality of nozzles effectively nor description about a technique offirst coating with the use of one nozzle and subsequently coating withthe used of the other nozzle. Therefore, it should be noted that theconcretization could not be attained by only the technique disclosed inthe publication.

SUMMARY OF THE INVENTION

In the above-mentioned situation, it is an object of the presentinvention to supply a substrate with processing liquids with the use ofa nozzle unit having a plurality of processing-liquid nozzles formedintegrally while preventing dryness of the processing liquids in theprocessing-liquid and also preventing the nozzle unit from beinglarge-sized.

In order to accomplish the above object, an aspect of the presentinvention provides a liquid processing method with use of a nozzle unithaving a plurality of processing-liquid nozzles arranged integrally andalso connected to respective processing-liquid supply passages, forsupplying a surface of a substrate with a processing liquid via one ofthe processing-liquid nozzles, the method comprising the steps of:

forming a processing-liquid layer, an air layer and a solvent layer ineach tip of the processing-liquid nozzles of the nozzle unit, in orderfrom the side of the processing-liquid supply passages;

subsequently discharging the solvent layer from one of theprocessing-liquid nozzles of the nozzle unit to a drain part;

supplying the surface of the substrate with a processing liquid throughthe one processing-liquid nozzle;

sucking the processing liquid remaining in the one processing-liquidnozzle so as to cause a liquid level of the processing liquid in the oneprocessing-liquid nozzle to retreat toward the processing-liquid supplypassages; and

dipping the tip of at least the one processing-liquid nozzle of thenozzle unit into a solvent in a solvent reservoir for storing thesolvent of the processing liquid; and

sucking the one processing-liquid nozzle so as to cause the liquid levelof the processing liquid in the one processing-liquid nozzle to furtherretreat toward the processing-liquid supply passages and also cause thesolvent in the solvent reservoir to be sucked into the tip of the oneprocessing-liquid nozzle, thereby forming a processing-liquid layer, anair layer and a solvent layer in the tip of the one processing-liquidnozzle, in order from the side of the processing-liquid supply passages.

Another aspect of the present invention provides a liquid processingmethod with use of a nozzle unit having a plurality of processing-liquidnozzles arranged integrally and also connected to respectiveprocessing-liquid supply passages, for supplying a surface of asubstrate with a processing liquid via one of the processing-liquidnozzles, the method comprising:

a first step of forming a processing-liquid layer, an air layer and asolvent layer in each tip of the processing-liquid nozzles of the nozzleunit, in order from the side of the processing-liquid supply passages;and

a second step of refilling the solvent layer reduced due to itsevaporation after a predetermined time has passed since an execution ofthe first step; wherein

the second step includes the steps of:

discharging the solvent layers from the respective processing-liquidnozzles of the nozzle unit to a drain part;

dipping respective tips of the processing-liquid nozzles of the nozzleunit into a solvent in a solvent reservoir for storing the solvent ofthe processing liquid; and

sucking the processing-liquid nozzles so as to cause liquid levels ofthe processing liquids in the processing-liquid nozzles to retreattoward the processing-liquid supply passages and also cause the solventto be sucked into the tips of the processing-liquid nozzles, therebyforming a processing-liquid layer, an air layer and a solvent layer inthe each tip of the processing-liquid nozzles, in order from the side ofthe processing-liquid supply passages.

In common with the above-mentioned methods, when the step of supplyingthe surface of the substrate with the processing liquid through the oneprocessing-liquid nozzle is done by supplying the processing liquid tothe substrate during rotating, it is preferable that the pluralprocessing-liquid nozzles of the nozzle unit are arranged on a straightline passing through a rotational center of the substrate and that thesolvent reservoir and the drain part are arranged on a straight linepassing through the rotational center of the substrate.

Further, it is preferable that the step of dipping the tip of at leastthe one processing-liquid nozzle of the nozzle unit into the solvent isdone by dipping respective tips of the processing-liquid nozzles intorespective solvent reservoirs provided for every processing-liquidnozzles, respectively. Still further, preferably, the step ofdischarging the solvent layer from the one processing-liquid nozzle isdone by moving the processing-liquid nozzles to a common drain part andsubsequently discharging the solvent layer from each of theprocessing-liquid nozzles. The solvent reservoir and the drain part maybe arranged in a common container adjacently.

According to the present invention, there is also provided a liquidprocessing apparatus comprising:

a substrate holder for holding a substrate horizontally;

a nozzle unit in which a plurality of processing-liquid nozzles areprovided in a common support integrally, the processing-liquid nozzlesbeing connected to respective processing-liquid supply passages to eachsupply the substrate held by the substrate holder with a processingliquid;

a solvent reservoir for storing a solvent of the processing liquid, thesolvent reservoir being arranged so as to allow either part or all ofthe processing-liquid nozzles of the nozzle unit to dip tips thereofinto the solvent;

a drain part arranged so as to allow part of the processing-liquidnozzles of the nozzle unit to discharge the processing liquid;

suck means for sucking the each processing-liquid nozzles of the nozzleunit;

transfer means for transferring the nozzle unit among the solventreservoir, the drain part and a position to supply the substrate withthe processing liquids; and

a controller including a program to control the suck means and thetransfer means so as to perform the steps of: discharging the solventlayer from one of the processing-liquid nozzles of the nozzle unit to adrain part; supplying the surface of the substrate with a processingliquid through the one processing-liquid nozzle; sucking the processingliquid remaining in the one processing-liquid nozzle so as to cause aliquid level of the processing liquid in the one processing-liquidnozzle to retire toward the processing-liquid supply passages; dippingthe tip of at least the one processing-liquid nozzle of the nozzle unitinto a solvent in a solvent reservoir for storing the solvent for theprocessing liquid; and sucking the one processing-liquid nozzle so as tocause the liquid level of the processing liquid in the oneprocessing-liquid nozzle to further retire toward the processing-liquidsupply passages and also cause the solvent in the solvent reservoir tobe sucked into the tip of the one processing-liquid nozzle, therebyforming a processing-liquid layer, an air layer and a solvent layer inthe tip of the one processing-liquid nozzle, in order from the side ofthe processing-liquid supply passages.

Furthermore, there is also provided a liquid processing apparatuscomprising:

a substrate holder for holding a substrate horizontally;

a nozzle unit in which a plurality of processing-liquid nozzles areprovided in a common support integrally, the processing-liquid nozzlesbeing connected to respective processing-liquid supply passages to eachsupply the substrate held by the substrate holder with a processingliquid;

a solvent reservoir for storing a solvent of the processing liquid, thesolvent reservoir being arranged so as to allow either part or all ofthe processing-liquid nozzles of the nozzle unit to dip tips thereofinto the solvent;

a drain part arranged so as to allow part of the processing-liquidnozzles of the nozzle unit to discharge the processing liquid;

suck means for sucking the each processing-liquid nozzles of the nozzleunit;

transfer means for transferring the nozzle unit among the solventreservoir, the drain part and a position to supply the substrate withthe processing liquids; and

a controller including a program to control the suck means and thetransfer means so as to perform the steps of: forming aprocessing-liquid layer, an air layer and a solvent layer in each tip ofthe processing-liquid nozzles of the nozzle unit, in order from the sideof the processing-liquid supply passages; and refilling the solventlayer reduced due to its evaporation after a predetermined time haspassed since an execution of the forming step. Here, the refilling stepfurther includes the steps of: discharging the solvent layers from therespective processing-liquid nozzles of the nozzle unit to a drain part;dipping respective tips of the processing-liquid nozzles of the nozzleunit into a solvent in a solvent reservoir for storing the solvent forthe processing liquid; and sucking the processing-liquid nozzles so asto cause liquid levels of the processing liquids in theprocessing-liquid nozzles to retire toward the processing-liquid supplypassages and also cause the solvent to be sucked into the tips of theprocessing-liquid nozzles, thereby forming a processing-liquid layer, anair layer and a solvent layer in the each tip of the processing-liquidnozzles, in order from the side of the processing-liquid supplypassages.

In common with the above-mentioned apparatus, when supplying the surfaceof the substrate rotated by the substrate holder with the processingliquid through the one processing-liquid nozzle, it is preferable thatthe plural processing-liquid nozzles of the nozzle unit are arranged ona straight line passing through a rotational center of the substrate andthat the solvent reservoir and the drain part are arranged on a straightline passing through the rotational center of the substrate.

Further, the nozzle unit may further include a solvent nozzle connectedto a solvent supply passage to supply the substrate held by thesubstrate holder with a solvent for the processing liquid. Stillfurther, it is preferable that the plural processing-liquid nozzles andthe solvent nozzle are together arranged on a straight line passingthrough the rotational center of the substrate. Preferably, the solventreservoir is provided with respect to each of the processing-liquidnozzles, correspondingly. The solvent reservoir and the drain part maybe arranged in a common container adjacently. Similarly, the drain partmay be provided corresponding to the solvent nozzle.

According to the present invention, since the air layer and the solventlayer for the processing liquid are formed outside the processing liquidin each processing-liquid nozzle in the supply of a substrate with theprocessing liquid with the use of the nozzle unit having a plurality ofthe processing-liquid nozzles formed integrally, the contact of theprocessing liquid with atmosphere is suppressed, whereby it is possibleto prevent the processing liquid in the processing-liquid nozzles not inuse from being evaporated while preventing the nozzle unit from beinglarge-sized.

Additionally, in the present invention, since the processing-liquidnozzle(s) used for the supply of the processing liquid is subjected tothe first suction and the second suction upon dipping a tip(s) of theabove nozzle(s) into the solvent for the processing liquid, it ispossible to form an air layer and a solvent layer outside the processingliquid again, whereby dryness of the processing liquid in the abovenozzle(s) can be prevented.

Still further, since the present liquid-processing method includes thestep of refilling the solvent layer reduced due to its evaporation aftera predetermined time has passed since the formation of theprocessing-liquid layer, the air layer and the solvent layer in each tipof the processing-liquid nozzles in order from the side of theprocessing-liquid supply passages, it is possible to suppress dryness ofthe processing liquid in the processing-liquid nozzles in spite of thepassage of the predetermined time.

According to the present invention, the plural processing-liquid nozzlesof the nozzle unit are arranged on the straight line passing through therotational center of the substrate and the solvent reservoir and thedrain part are arranged on the straight line passing through therotational center of the substrate. Thus, by moving theprocessing-liquid nozzles in one direction horizontally and elevatingthe nozzles, it is possible to transfer the nozzle unit among oneposition where the processing-liquid nozzle supplies the substrate withthe processing liquid, another position where the solvent layer isdischarged from the processing-liquid nozzle into the drain part and theother position where the processing-liquid nozzle sucks in the solventfrom the solvent reservoir. Therefore, as it eliminates the need for adriving mechanism for moving the nozzle unit to another directionhorizontally, it is possible to simplify the mechanism for moving thenozzle unit.

These and other objects and features of the present invention willbecome more fully apparent from the following description and appendedclaims taken in conjunction with the accompany drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing an embodiment where the presentinvention is applied to a coating apparatus;

FIG. 2 is a schematic perspective view showing the above coatingapparatus;

FIG. 3 is a perspective view of a nozzle unit in the above coatingapparatus;

FIG. 4 is a front sectional view showing the above nozzle unit;

FIGS. 5A and 5B are plan views showing respective positionalrelationships among the above nozzle unit, a standby unit and a wafer;

FIGS. 6A and 6B are sectional side views each showing the above nozzleunit;

FIGS. 7A, 7B and 7C are process diagrams for explanation of theoperation of the above coating apparatus;

FIGS. 8A, 8B, 8C and 8D are process diagrams for explanation of theoperation of the above coating apparatus;

FIGS. 9A, 9B and 9C are process diagrams for explanation of theoperation of the above coating apparatus;

FIGS. 10A and 10B are process diagrams for explanation of the operationof the above coating apparatus;

FIG. 11 is a plan view showing one example of a resist-pattern formationapparatus where the above coating apparatus is built in;

FIG. 12 is a perspective view showing one example of the aboveresist-pattern formation apparatus;

FIGS. 13A and 13B are characteristic diagrams showing the in-planeuniformity of film thickness on a wafer in view of confirming an effectof the invention;

FIGS. 14A and 14B are characteristic diagrams showing the in-planeuniformity of film thickness on a wafer in view of confirming an effectof the invention;

FIGS. 15A and 15B are characteristic diagrams showing the in-planeuniformity of film thickness on a wafer in view of confirming an effectof the invention;

FIG. 16 is a sectional view showing another example of the nozzle unitof the invention; and

FIG. 17 is a sectional view showing a conventional all-in-one nozzle.

DESCRIPTION OF THE PREFERRED EMBODIMENT

An embodiment where a liquid processing apparatus of the presentinvention is applied to a coating apparatus for performing theapplication process of resist liquid will be described with reference toaccompanying drawings. In FIG. 1, reference numeral 2 designates acoating apparatus. The coating apparatus 2 includes a spin chuck 21forming a substrate holding part to absorb the center part (backside) ofa semiconductor wafer W as a substrate, which will be referred “wafer”after, and hold it horizontally. This spin chuck 21 is connected to adriving mechanism (spin chuck motor) 23 through a shaft part 22. Thus,the spin chuck 21 is rotatable and movable up and down by the drivingmechanism 23.

Outside the periphery of the wafer W held on the spin chuck 21, there isa cup body 3 that opens upwardly so as to surround the wafer W. Theupper portion of the sidewall of the cup body 3 is inclined inwardly inthe radial direction. Further, the cup body 3 is provided, on its bottomside, with a liquid receiver 31 in the form of a concave part. Theliquid receiver 31 is divided, below and along the whole circumferenceof the wafer W, to an outside zone 32 and an inside zone 33. A drainpassage 34 is connected to the bottom of the outside zone 32 todischarge drains, such as processing liquid, from the zone 32. While,two exhaust passages 35 a, 35 b are connected to the bottom of theoutside zone 32.

A circular plate 37 is arranged below the wafer W, while an annularmember 38 is arranged so as to surround the outside of the circularplate 37. On the outer end face of the annular member 38, an end plate39 is provided so as to extend downwardly and enter the interior of theoutside zone 32. With this structure, processing liquid etc. isintroduced into the outside zone 32 via respective surfaces of the endplate 39 and the annular member 38. Although not shown in the figure,elevating pins are arranged so as to penetrate the annular member 37vertically. These elevating pins are constructed so as to be movable upand down while supporting the backside of the wafer W. Due tocollaborative work of the elevating pins with main transfer meansmentioned later, the wafer W can be transferred to and from the spinchuck 21.

In the figure, reference numeral 4 denotes a nozzle unit for supplyingthe wafer W held on the spin chuck 21 with processing liquids andsolvent for the liquids. As shown in FIGS. 2 to 5B, this nozzle unit 4includes a plurality of processing-liquid nozzles (e.g. ten nozzles 4Ato 4J) for supplying the wafer W with the processing liquid (e.g. resistliquid) and one solvent nozzle 5 for supplying the wafer W with asolvent (e.g. thinner liquid) for the processing liquids. In the nozzleunit 4, these nozzles 4A to 4J and 5 are fixed to a common support 41into one body. The support 41 is further provided with a not-showntemperature control mechanism.

For example, as shown in FIGS. 3 to 5B, the processing-liquid nozzles 4Ato 4J and the solvent nozzle 5 are fixed to the support 41 in a mannerthat five processing-liquid nozzles 4A to 4E and five processing-liquidnozzles 4F to 4J make a straight line along the longitudinal direction(i.e. Y-axis direction) of the coating apparatus 5 on both sides of thesolvent nozzle 5 as a center.

As shown in FIG. 4, the processing-liquid nozzles 4A to 4J arecommunicated with processing-liquid sources 43A to 43J throughprocessing-liquid supply passages 42A to 42J interposed by suck-backvalves VA to VJ and flow control units CA to CJ having respectivevalves, respective massflow controllers and so on, respectively. Theseprocessing-liquid supply passages 42A to 42J and one or more nozzletemperature-control pipes (e.g. two pipes—not shown) for supplyingfluids, whose temperatures are controlled by the above temperaturecontrol mechanism, are together made from flexible material so as not tointerfere with later-mentioned movements of the nozzle unit 4. Further,the processing-liquid supply passages 42A to 42J and the not-shownnozzle temperature-control pipes extend to the underside of alater-mentioned base plate 48, in a bundle. Below the base plate 48, forinstance, the passages 42A to 42J and the nozzle temperature-controlpipes are connected to the suck-back valves VA to VJ, the flow controlunits CA to CJ, the processing-liquid sources 43A to 43J, a pump,filters, etc.

Now, FIG. 6A shows the processing-liquid supply passage 42A formed inthe support 41, for the processing-liquid nozzle 4A. Note, theabove-mentioned suck-back valves VA to VJ constitute suck means of theinvention, while the flow control units CA to CJ constitute means forcontrolling the flow rate of the processing liquid. In theprocessing-liquid sources 43A to 43J, there are stored different kindsof resist liquids or one kind of resist liquid but having differentviscosities, for example, I-Line resist liquid, KrF resist liquid, ArFresist liquid, etc., as the processing liquids. The above solvent nozzle5 is communicated with a solvent source 53 through a solvent supplypassage 52. In FIG. 4, reference numeral 51 denotes a flow control valveequipped with a valve, a massflow controller and so on.

The suck-back valves VA to VJ are provided to allow respective liquidlevels of the processing liquids, which would remain in theprocessing-liquid nozzles 4A to 4J when the discharge of the processingliquids via the nozzles 4A to 4J is stopped, to retire (i.e. phenomenonof suck-back) toward the processing-liquid supply passages 42A to 42J.For this purpose, the suck-back valves VA to VJ are respectivelyequipped with bellows having vacuum chambers in communication with theprocessing-liquid supply passages 42A to 42J. If the bellows areexpanded to form negative pressures in the vacuum chambers, then itbecomes possible to make the processing liquids in the nozzles 4A to 4Jgo back to the corresponding processing-liquid supply passages 42A to42J. Although not shown, the suck-back valves VA to VJ are respectivelyprovided with needles that allow the maximum volumes of the vacuumchambers to be varied, allowing adjustment of retreating respectivedistances of the liquid levels of the processing liquids at the tips.The operations of the suck-back valves VA to VJ are controlled by acontroller mentioned later.

A standby unit 6 for the nozzle unit 4 is attached to the outer face ofthe above cup 3. The standby unit 6 is formed so that, for example, allof the processing-liquid nozzles 4A to 4J can dip their tips into thesolvents. Thus, corresponding to the processing-liquid nozzles 4A to 4Jand the solvent nozzle 5, the standby unit 6 includes solvent reservoirs61A to 61J and a drain part 62 at the center of the unit 6. In a commoncontainer 63, the solvent reservoirs 61A to 61J and the drain part 62 sare arranged so as to adjoin each other in a straight line along adirection Y.

FIG. 6A is a longitudinal sectional view of the drain part 62. FIG. 6Ais a longitudinal sectional view of the solvent reservoir 61A. In thefigures, reference numeral 64A denotes a drain passage that is adjacentto the solvent reservoir 61A. The respective drain passages 64A (64B to64J) respectively adjoining the solvent reservoirs 61A (61B to 61J) arecommunicated with each other and also connected with a drain chamber 65in communication with the drain part 62. With the structure, thesolvents overflowing out of the solvent reservoirs 61A to 61F can flowinto the drain chamber 65 through the drain passages 64A to 64J andsubsequently, they flow out of the chamber 65 through a drain port 66formed on the bottom of the container 63.

As shown in FIGS. 2 and 5A, the nozzle unit 4 is constructed so as to bemovable up and down (movable in a direction Z) along an elevating shaft45 extending in the direction Z due to an elevating mechanism 44.Additionally, along a guide rail 47 extending along the long direction(direction Y) of the coating apparatus 2, the nozzle unit 4 can move ona straight line L passing through the rotational center O of the wafer Wdue to a horizontal moving mechanism 46. Note, the elevating mechanism44 and the horizontal moving mechanism 46 do constitute moving means ofthe invention. Reference numeral 48 designates the above-mentioned baseplate.

For instance, as shown in FIG. 5A, the processing-liquid nozzles 4A to4J and the solvent nozzle 5 of the nozzle unit 4 are arranged on thestraight line L passing through the rotational center O of the wafer W.Similarly, as shown in FIG. 5B, the solvent reservoirs 61A to 61J andthe drain part 62 of the standby unit 6 are positioned on the straightline L passing through the rotational center O of the wafer W. Notethat, in FIGS. 5A and 5B, the nozzle unit 4 and the standby unit 6 arerepresented largely in comparison with the representation of the wafer Wfor the sake of simply illustration. Additionally, discharge openings atthe tips of the nozzles are shown in the figure although they areinvisible in a normal state.

The elevating mechanism 44 and the horizontal moving mechanism 46 areformed by, for example, motors. With the above constitution, the nozzleunit 4 is constructed so as to be movable among: a standby positionwhere the tips of the processing-liquid nozzles 4A to 4J are positionedsomewhat higher (e.g. approx. 1 to 2 mm higher) than the top surface ofthe container 63 of the standby unit 6; a position where theprocessing-liquid nozzles 4A to 4J dip their tips in the solvents in thesolvent reservoirs 61A to 61J by approx 1 mm from respective liquidlevels of the solvents; and a position where any one of the nozzles4A-4J and 5 can supply the processing liquid or the solvent to therotational center of the wafer W. Further, the nozzle unit 4 is movableup and down and also movable in the direction Y to positions where eachof the processing-liquid nozzles 4A to 4J can oppose the drain part 62.

The operations of the suck-back valves VA to VJ, the flow control unitsCA to CJ, the elevating mechanism 44 and the horizontal moving mechanism46 are all controlled by a controller 100. That is, the suck-backoperations of the single processing-liquid nozzle 4A (4B to 4J) or allthe processing-liquid nozzles 4A to 4J can be accomplished at apredetermined timing by the controller 100. Additionally, the controller100 previously stores the amounts of the processing liquids and thesolvents to be sucked back, the amounts of the processing liquids andthe solvents to be discharged from the processing-liquid nozzle 4A (4Bto 4J), controlled variables of the suck-back valves VA to VJ and theflow control units CA to CJ for attaining these amounts to be suckedback or discharged, etc. Thus, the suck-back operations and thedischarge operation are carried out in accordance with predeterminedprocessing programs stored in the controller 100.

Next, the present liquid processing method carried by theabove-mentioned coating apparatus 2 will be described. Before performingthe coating operation by the coating apparatus 2, it is carried out toform, in order from the sides of the processing-liquid supply passages42A to 42J, a processing-liquid layer, an air layer and a solvent layerfor the processing liquid in each tip of the processing-liquid nozzles4A to 4J of the nozzle unit 4. In detail, as shown in FIG. 7A, thesuck-back valves VA to VJ in the processing-liquid supply passages 42Ato 42J for the processing-liquid nozzles 4A to 4J perform the firstsuck-back operation. Consequently, the liquid level of theprocessing-liquid layer 71 in each of the processing-liquid nozzles 4Ato 4J changes from a pre-suction state (as representatively shown withthe processing-liquid nozzle 4A in FIG. 8A) and retreats toward theprocessing-liquid supply passages 42A, as shown in FIG. 8B. Thus, theliquid level is raised from the tip of the nozzle 4A. In connection, itis desirable to operate the suck-back valve VA so that the liquid levelof the processing-liquid layer in the nozzle 4A rises from its tip byapprox. 1 to 1.5 mm.

Next, as shown in FIGS. 7B and 8C, it is carried out to move the nozzleunit 4 to a position opposing the standby unit 6 and further performedto allow the processing-liquid nozzles 4A to 4J to dip respective tipsinto solvents 72 in the solvent reservoirs 61A to 61J. Regarding thesupply of the solvent reservoirs 61A to 61J with the solvents, inadvance of the above dipping, the solvent nozzle 5 may move torespective position opposing the solvent reservoirs 61A to 61J, in turnswhere the nozzles further blasts out the solvent into the solventreservoirs 61A to 61J. Alternatively, the solvent reservoirs 61A to 61Jmay be respectively provided with thinner suppliers, as shown in FIG. 6Brepresentatively.

Next, as shown in FIG. 7C, the suck-back valves VA to VJ in theprocessing-liquid supply passages 42A to 42J for the processing-liquidnozzles 4A to 4J perform the second suck-back operation. Consequently,as shown in FIG. 8D, the liquid level of the processing-liquid layer 71in each of the processing-liquid nozzles 4A to 4J retreats toward theprocessing-liquid supply passages 42A to 42J furthermore and thesolvents in the solvent reservoirs 61A to 61J are sucked in the tips ofthe nozzles 4A to 4J. In this way, the processing-liquid layer 71, theair layer 73 and the solvent layer 74 for the processing liquid areformed in each tip of the processing-liquid nozzles 4A to 4J, in orderfrom the sides of the processing-liquid supply passages 42A to 42J.

Now, if the nozzles 4A to 4J of approx. 1.2 to 2 mm in bore diameter areemployed, it is preferable that the air layer 73 in each of the nozzles4A to 4J has a thickness of approx. 2 mm. Regarding the thickness of thesolvent layer 74, it depends on a period for preventing dryness of theprocessing liquid. For instance, if required to prevent dryness of theprocessing liquid in a period of approx. 2 hours, it is desirable thatthe solvent layer 74 has a thickness of approx. 1.5 to 2 mm, which willbe obvious from later-mentioned experiments. Note, the degree of arising of the liquid level of the processing-liquid layer 71 from thetip of the nozzle, which is caused by the first suction, and thethicknesses of the air layer 73 and the solvent layer 74 both formed atthe second suction are controlled for every nozzles, due to suckingforces of the suck-back valves VA to VJ. In this way, a series ofoperations where the suction is performed by the suck-back valves VA toVJ under two time frames while interposing the dip of the tips of thenozzles 4A to 4J into the solvent reservoirs 61A to 61J, is carried outon the basis of the process program stored in the controller 100.

Next, citing an instance of the coating operation using oneprocessing-liquid nozzle 4A of the nozzle unit 4 (the rightmost nozzlein FIG. 9A), we describe the coating process of a wafer W performed bythe coating apparatus 2 having the nozzle unit 4 where theprocessing-liquid layers 71, the air layers 73 and the solvent layers 74are formed in the tips of the nozzles 4A to 4J.

First, it is carried out to discharge the solvent layer 71 from theprocessing-liquid nozzle 4A. In detail, as shown in FIG. 9A, the nozzleunit 4 is moved so that the processing-liquid nozzle 4A opposes thedrain part 62 of the standby unit 6 and a predetermined amount ofprocessing liquid due to the flow control unit CA is discharged from thenozzle 4A. Subsequently, the processing liquid is sucked back. Then, inview of reducing a scrappage amount of the processing liquid, the chargeamount of the processing liquid for accomplishing the discharge of thesolvent layer 74 only is previously determined by experiments. Forinstance, the liquid level of the processing liquid is lowered byapprox. 2 mm to discharge the solvent layer 74 from the nozzle. Note, acontrolled variable for the flow control unit CA allowing the abovecharge amount of the processing liquid is stored in the controller 100in advance.

Next, the nozzle unit 4 is moved to a coating position where theprocessing-liquid nozzle 4A supplies a wafer W with an embrocation (i.e.processing liquid). Then, the processing-liquid nozzle 4A supplies thewafer W with the processing liquid, putting a coating process intoexecution. In the coating process, the spin chuck 21 is positioned abovethe cup 3, while a wafer W transferred from the previous step bynot-shown main transfer means is delivered onto the spin chuck 21 incorporation with the elevating pins (not shown) and successively, thespin chuck 21 is lowered to a processing position.

Next, the nozzle unit 4 is moved to a position where the solvent nozzle5 can supply the solvent to the rotational center O of the wafer W heldon the spin chuck 21. Then, the wafer W is supplied with a thinnerliquid as the solvent. By rotation of the wafer W with the spin chuck21, the thinner liquid is diffused from the center O up to the peripheryof the wafer W due to centrifugal force. Next, the rotation of the spinchuck 21 is stopped and additionally, the nozzle unit 4 is moved to aposition where the processing-liquid nozzle 4A can supply a processingliquid to the rotational center O of the wafer W held on the spin chuck21. In this way, the wafer W is supplied with a resist liquid A as theprocessing liquid. Similarly, by rotation of the wafer W with the spinchuck 21, the resist liquid A is diffused from the center O up to theperiphery of the wafer W due to the centrifugal force. It is noted thatthe resist liquid A is applied on the wafer W whose surface is gettingwet by the thinner liquid. Then, the spin chuck 21 is moved upside thecup 3 and thereafter, the wafer W having the resist liquid A coatedthereon is delivered to the not-shown main transfer means by thenot-shown elevating pins.

In the meanwhile, if the spouting of the embrocation is not carried outover a predetermined period since the coating process has beencompleted, it is carried out to form the processing-liquid layer 71, theair layer 73 and the solvent layer 74 in the tip of theprocessing-liquid nozzle 4A on use. That is, as mentioned before, thesuck-back valve VA performs the first suction on the nozzle 4A (see FIG.9C) and subsequently, the nozzle unit 4 is moved to a position to opposethe standby unit 6 where the nozzles 4A to 4J dip their tips into thesolvents 72 in the solvent reservoirs 61A to 61J, as shown in FIG. 10A.In succession, as shown in FIG. 10B, the suck-back valve VA performs thesecond suction on the used nozzle 4A only. As a result, there are formedthe processing-liquid layer 71, the air layer 73 and the solvent layer74 in the tip of the nozzle 4A, in order from the side of theprocessing-liquid supply passage 42A. Alternatively, the above-mentionedsecond suction of the suck-back valve VA may be accomplished by dippingthe nozzle 4A into the solvent 72 in any one of the solvent reservoirs61A to 61J.

Subsequently, in case of coating the wafer W with the use of theprocessing-liquid nozzle 4B different from the above processing-liquidnozzle 4A, the nozzle unit 4 is moved so that the processing-liquidnozzle 4B opposes the drain part 62 of the standby unit 6, dischargingthe solvent layer 74 in the nozzle 4B, as similar to the use of theprocessing-liquid nozzle 4A. Next, the wafer W is coated with a resistliquid B as the processing liquid with the use of the processing-liquidnozzle 4B and successively, it is carried out to form theprocessing-liquid layer 71, the air layer 73 and the solvent layer 74 inthe tip of the processing-liquid nozzle 4B. Then, it is desirable thatthe nozzle unit 4 normally waits ready in the atmosphere. For instance,the nozzle unit 4 is held in a standby position where the tips of theprocessing-liquid nozzles 4A to 4J are somewhat higher than the topsurface of the container 63 of the standby unit 6 by e.g. approx. 1.5 to2 mm.

Note, a series of operations of: discharging the solvent from the nozzle4A; performing the designated coating process, first sucking the usednozzle 4A; dipping its tip into the solvent reservoir; and secondlysucking the nozzle 4A by the suck-back valve Va, and another series ofoperations for the next coating process with the use of the nozzle 4B,are carried out on the basis of the process program stored in thecontroller 100.

According to the above-mentioned processing method, since the air layer73 and the solvent layer 74 are formed outside the processing-liquidlayer 71 in each tip of the processing-liquid nozzles 4A to 4J, thecontact of the processing-liquid layer 71 with atmosphere can beavoided. In spite of the presence of the air layer 73 between theprocessing-liquid layer 71 and the solvent layer 74, as the air layer 73is saturated with evaporation of the solvent, an atmosphere forhydrating the processing liquid is established there to prevent theprocessing liquids in the processing-liquid nozzles 4A to 4J fromevaporating. In addition, owing to the air layer 73 between theprocessing-liquid layer 71 and the solvent layer 74, the contact of thelayer 71 with the layer 74 is suppressed, so that the solvent in thesolvent layer 74 can be prevented from mixing with the processingliquid.

In this way, since the dryness of the processing liquid is suppressed byforming the air layers 73 and the solvent layer 74 outside theprocessing-liquid layers 71 in the processing-liquid nozzles 4A to 4J,there is no possibility that in the “all-in-one” nozzle having aplurality of nozzles formed integrally, the processing liquids in thenozzles not in use are exposed to atmosphere, so that it is possible tosuppress dryness of the processing liquid certainly. Additionally, incomparison with an arrangement where a dry-proof member is attached tothe nozzle unit 4 having a plurality of nozzles, it is possible toprevent the whole unit 4 from being large-sized. Even if increasing thenumber of processing-liquid nozzles in the nozzle unit 4, the size ofthe unit 4 is quit for its increase due to the addition of nozzles.

Further, with the prevention of dryness of the processing liquid in theprocessing-liquid nozzles 4A to 4J, there is no need to drain themalformed processing liquid as a result of the dryness before thecoating process or periodically, where the running cost of the coatingapparatus can be saved by restraining the waste of expensive processingliquid.

Since all of the processing-liquid nozzles 4A to 4J are subjected to thefirst suck-back operation of withdrawing the processing liquids in therespective tips and the second suck-back operation upon dipping the tipsinto the solvent, it is possible to form the processing-liquid layers71, the air layers 73 and the solvent layers 74 in all the nozzles 4A to4J simultaneously, collectively, easily and effectively.

As for the processing-liquid nozzle that has been used to supply thewafer with the processing liquid, since the same nozzle is subjected tothe first suction and the second suction upon dipping its tip into thesolvent reservoir, it is possible to again form the processing-liquidlayer 71, the air layer 73 and the solvent layer 74, whereby the drynessof the processing liquid in the above processing-liquid nozzle can beprevented.

In the nozzle unit 4, additionally, since the processing-liquid nozzles4A to 4J and the solvent nozzle 5 are arranged on the straight line Lpassing through the rotational center O of the wafer W and the solventreservoirs 61A and the drain part 62 are arranged on the straight line Lpassing through the rotational center O of the wafer W, it is possibleto transfer the nozzle unit 4 among a position where each of theprocessing-liquid nozzles 4A to 4J supplies the wafer W with theprocessing liquid, another position where the solvent layer 74 isdischarged from each of the processing-liquid nozzles 4A to 4J into thedrain part 4A to 4J and the other position where each of theprocessing-liquid nozzles 4A to 4J sucks in the solvent from each of thesolvent reservoirs 61A to 61J by moving each of the processing-liquidnozzles 4A to 4J in one direction horizontally (direction Y) andelevating each of the nozzles 4A to 4J. That is, as it allows the nozzleunit 4 to be moved to a designated position without using a drivingmechanism for moving the nozzle unit to another direction (direction X)horizontally, it is possible to simplify means for moving the nozzleunit 4.

In addition to the above arrangement of the processing-liquid nozzles 4Ato 4J and the solvent nozzle 5, since the solvent reservoirs 61A to 61Jand the drain part 62 of the standby unit 6 are arranged on the straightline L passing through the rotational center O of the wafer W so as tocorrespond to the processing-liquid nozzles 4A to 4J and the solventnozzle 5 respectively, it is possible to miniaturize the standby unit 6.That is, it is desirable to arrange the solvent reservoirs 61A to 61J ina manner that all of the processing-liquid nozzles 4A to 4J can diptheir tips into the solvent in order to form the solvent layers 74 inall of the nozzles 4A to 4J effectively, while the discharge of thesolvent layer 74 before the coating process is carried out one nozzle byone nozzle. Thus, it means that the standby unit 6 has only to possess asingle drain part 62. In addition to this constitution, since the drainpart 62 is arranged so as to oppose the solvent nozzle 5, it is possibleto save the installation space of the standby unit 6.

Additionally, due to the individual arrangement of the solventreservoirs 61A to 61J, it is possible to allow the coating apparatus tomeet a situation using a different solvent with respect to eachprocessing liquid. Even if the resist liquid enters the solventreservoirs 61A to 61J into mixture, there is no possibility that onenozzle is infiltrated by difference resist liquids.

Still further, since the processing-liquid nozzles 4A to 4J are dividedinto two equal numbers on both sides of the solvent nozzle 5 as thecenter and correspondingly, the drain part 62 is arranged at the centerof the standby unit 6, the moving distances of the nozzle unit 4 todischarge the solvent layers 74 from the processing-liquid nozzles 4A to4J is reduced in comparison with those in case of arranging the drainpart 62 at the extremity of the standby unit 6, improving the operatingefficiency of the apparatus.

Next, a process (i.e. the second step) for refilling the solvent layer74, whose amount has been decreased due to the evaporation, in each ofthe processing-liquid nozzles 4A to 4J will be described. It isgenerally noted that the solvent layer 74 is composed of volatilecomponents. Consequently, since the solvent layer 74 vaporizes with apassage of time, the resultant reduction of an amount of the solventlayer 74 may cause an incomplete prevention of dryness of the processingliquid. The second step is provided to meet such a situation. The timingof periodically refilling the solvent layer 74, namely, a period fromthe previous formation of the layers 71, 73 and 74 for all the nozzles4A to 4J at the first step till the present formation of the solventlayer 74 is previously determined in compliance with the sorts ofsolvent forming the formed solvent layer 74, a thickness of the layer 74formed at the first step and so on.

At the second step, it is firstly performed to discharge the solventlayers 74 from the respective processing-liquid nozzles 4A to 4J. Indetail, at first, the nozzle unit 4 is moved so that the first nozzle 4Aopposes the drain part 62 of the standby unit 6 and there, the solventlayer 74 is discharged with the supply of a predetermined amount ofprocessing liquid by the flow control unit CA. Thereafter, the similaroperation is performed against the other nozzles 4B to 4J, dischargingthe solvent layers 74 therefrom.

Note, the amount supplied of the processing liquid for discharging onlythe solvent layer 74 changes depending on a timing of executing theperiodical refilling of the solvent layer 74. Thus, by experiments,there are previously obtained an appropriate timing, a discharge rate ofthe layer 74 at that time, a controlled variable of the flow controlunit CA at that time, etc., all of which are further stored in thecontroller 100 in advance.

Then, the nozzle unit 4 is moved to a position opposing the standby unit6 where the tips of the processing-liquid nozzles 4A to 4J are dippedinto the solvents 72 in the solvent reservoirs 61A to 61J, respectively.In succession, all of the valves 61A to 61J are sucked by the suck-backvalves VA to VJ, so that the processing-liquid layers 71, the air layers73 and the solvent layers 74 are formed in the tips of all the nozzles4A to 4J.

In the above way, this periodical formation of the solvent layers 74, isaccomplished by discharging the solvent layer 74 from each of thenozzles 4A to 4J after a predetermined time has passed since theprevious formation of the layers 71, 73 and 74 in all the nozzles 4A to4J. Alternatively, the above periodical formation may be accomplished bydirectly dipping the tips of the nozzles 4A to 4J into the solvents 72of the solvent reservoirs 61A to 61J and subsequently sucking all thenozzles 4A to 4J through the suck-back valves VA to VJ, thereby formingnew solvent layers 74 at the tips of all the nozzles 4A to 4J.

Because, even if again forming the solvent layers 74 at a timing ofeither leaving a predetermined amount of solvent layer 74 or evaporatingit almost on condition that the solvent layers 74 have been formed inall the nozzles 4A to 4J in a manner that they would evaporatesubstantially simultaneously, the adjustment of suction rates by thesuck-back valves VA to VJ would allow the layers 74 to be formed withdesired thicknesses. Then, by experiments, there are previously obtaineda timing of forming the solvent layers 74 periodically, suction rates ofthe layers 74 at that time, etc., all of which are further stored in thecontroller 100 in advance.

Note, a series of operations of: discharging the solvent from the nozzle4A; performing the designated coating process, first sucking the usednozzle 4A; dipping its tip into the solvent reservoir; and secondlysucking the nozzle 4A by the suck-back valve Va, and another series ofoperations for the next coating process with the use of the nozzle 4B,are carried out on the basis of the process program stored in thecontroller 100.

As for the periodical formation of the solvent layers 74, a series ofoperations of: discharging the solvent from the nozzles 4A to 4J;dipping their tips into the solvent reservoirs 61A to 61J; and operatingthe suck-back valves VA to VJ to suck the nozzles 4A to 4J are executedon a basis of the processing program stored in the controller 100.

Thus, since the periodical formation of the solvent layers 74 atpredetermined timings allows the solvent layers 74, whose amounts havebeen reduced due to evaporation with the passage of time, to berefilled, it is possible to prevent dryness of the processing liquidcertainly even when the processing-liquid nozzles 4A to 4J are not usedin readiness for a long time.

The overall constitution of a resist-pattern forming system where anexposure unit (part) is connected with a coating-and-developingapparatus having the above-mentioned coating apparatus incorporatedtherein will be described in brief with reference to FIGS. 11 and 12. Inthese figures, alphabetic signage S1 denotes a carrier mount for loadingand unloading a carrier 8 accommodating a plurality of substrates (e.g.thirteen wafers W) in a sealed state. The carrier mount S1 includes acarrier station 80 capable of mounting a plurality of carriers 8 forminga row, drawspans 81 formed in a front wall of the carrier station 80 anda transfer unit 82 for picking up a wafer W from the carrier 8 throughthe drawspan 81.

Behind the carrier mount S1, a processing section S2 surrounded by acasing 83 is connected to the mount S1 and includes, in order from thenear side, shelf units U1, U2 and U3 each having multistageheating/cooling units, liquid-processing units U4 and U5, and maintransfer units MA1 and MA2 for transferring a wafer W between the shelfunit U1 (U2, U3) and the liquid-processing unit U4 (U5). The units U1 toU3 and the units MA1, MA2 are arranged one after another so as to form aline back and forth in a view from the carrier mount S1. At respectiveconnection between the shelf unit U1 (U2, U3) and the units MA1 (MA2),not-shown openings for allowing passage of a wafer W are formed so as toallow the wafer W to be moved in the processing section S2 freely, fromthe shelf unit U1 on one side to the shelf unit U3 on the other side.

Each of the shelf units U1, U2 and U3 is formed by various units forpretreatment/posttreatment of the operations executed at theliquid-processing units U4, U5, laminated in plural stages (e.g. tenstages). In combination, there are contained, in each shelf unit, adelivery unit, a hydrophobic-treatment unit (ADH), a thermo-regulatingunit (CPL) for adjusting a wafer W at a predetermined temperature, abaking unit (BAKE) for heating a wafer W before coating resist liquid, aheating unit (PAB) referred to as “pre-baking unit” for heating a waferW after coating the resist liquid, a heating unit (POST) referred to as“post-baking unit” for heating a wafer W after development, etc.

As shown in FIG. 12, each of the liquid-processing units U4, U5 isformed by an antireflective coating unit (BARC), the coating apparatus(COT) 2 of the invention, a developing unit (DEV) for supplying a waferW with developing liquid for development, etc. laminated in pluralstages, for example, five stages.

Behind the shelf unit U3, an exposure section S4 is connected to thesection S2 through an interface section S3. The interface section S3comprises a first transfer chamber 84 and a second transfer chamber 85both arranged between the processing section S2 and the exposure sectionS4. The first transfer chamber 84 and the second transfer chamber 85include a first transfer arm 86 and a second transfer arm 87,respectively. Both of the arms 86, 87 are constructed so as to bemovable up and down, rotatable about a vertical axis and also movableback and forth.

Additionally, the first transfer chamber 84 is provided with a shelfunit U6 in which, for example, a delivery unit, a high-accuracythermo-regulating unit (CPL), heating/cooling units (PEB) for applying apost-exposure baking on a wafer W, etc. are laminated vertically.

Taking only one case, the flowing of a wafer W in the resist-patternforming system will be described. For instance, a wafer W mounted on thecarrier mount S1 is transferred in the following route of: thethermo-regulating unit (CPL)→the antireflective coating unit (BARC)→thebaking unit (BAKE)→the thermo-regulating unit (CPL)→the coatingapparatus (COT) 2→the heating unit (PAB)→the exposure section S4. In theexposure section S4, the wafer W is subjected to an exposing process.Then, the wafer W after exposure is transferred in the following routeof: the high-accuracy thermo-regulating unit (CPL)→the developing unit(DEV)→the heating unit (POST)→the thermo-regulating unit (CPL)→thecarrier 8 of the carrier mount S1.

[Experiments]

Experiments were performed to confirm the effects of the presentinvention.

(Experiment 1)

Using the above-mentioned coating apparatus, I-Line resist as theprocessing liquid and OK73 thinner as the solvent, the experiment 1 wasperformed wherein an air layer 73 having a thickness of 2 mm and asolvent layer 74 having a thickness of 1.5 to 2 mm were formed in thetip of a processing-liquid nozzle having a bore of 2 mm. While keepingthe nozzle unit 4 waiting at the standby position above the standby unit6, the variation per hour of the solvent layer 74 was estimatedvisually. Note, the nozzle unit 4 was disposed in an environment of 23°C. in temperature and 45% RH in humidity.

As a result, it was confirmed that the solvent layer 74 began todecrease after one hour has passed since the formation of the layer 74and that it came to nothing due to evaporation after two hours havepassed. Further, It was found that it was necessary to form (refill) anew solvent layer 74 within an elapse time from 1.5 to 2 hr. since thefirst formation of the solvent layer 74 in order to attain the solventlayer 74 having the above thickness or so.

(Experiment 2)

Using the above-mentioned coating apparatus, I-Line resist as theprocessing liquid and OK73 thinner as the solvent, the experiment 2 wasperformed wherein an air layer 73 having a thickness of 2 mm and asolvent layer 74 having a thickness of 1.5 to 2 mm were formed in thetip of a processing-liquid nozzle having a bore of 2 mm. In this state,the coating process of the processing liquid was successively applied tofour wafers W each having a diameter of 200. Subsequently, the in-planeuniformity about the film thicknesses on each wafer W was estimated bymeasuring film thicknesses on the wafer W at forty-nine points.

The result is shown in FIG. 13A for the second to fourth wafers W andFIG. 13B for the first wafer W. In common with FIGS. 13A and 13B, ahorizontal axis denotes respective positions on a wafer W, which areformed by forty-nine points on a spiral line extending from the wafer'scenter (pt. 1) toward the periphery. It should be noted that greatnumbered points designate respective position in the vicinity of thewafer's periphery. In FIG. 13A, mark ⋄ (I-Line 2) designates the secondwafer in the coating process, mark Δ (I-Line 3) the third wafer, andmark □ (I-Line 4) designates the fourth wafer in the coating process. InFIG. 13B, mark ⋄ (I-Line 1) designates the first wafer in the coatingprocess, and mark □ (I-Line av.) designates an average value of dataabout the second to fourth wafers.

Here, the solvent layer 74 together with the processing liquid wereejected to the first wafer W, while only the processing liquid wasejected to the second to fourth wafers W. As a result, it was confirmedthat the second to fourth wafers W were provided with similar profilesand that degeneration in the processing liquid was suppressed due to theabsence of coating defectiveness. While, as for the first wafer W, itwas confirmed that its profile was different from those of the second tofourth wafers and that coating defectiveness is produced under theinfluence of a mixing of the solvent layer 74. In conclusion, it wasrecognized that high in-plane uniformity could be accomplished byperforming a coating process after discharging the solvent layer 74.However, it was also confirmed that the film thicknesses of the first tofourth wafers W were within an allowable range about in-plane uniformityand that the coating defectiveness would be less severe even if thesolvent layer 74 were mixed into the coating.

(Experiment 3)

Using KrF resist as the processing liquid and OK73 thinner as thesolvent, the experiment 3 was performed as similar to the experiment 2.The result is shown in FIG. 14A for the second to fourth wafers W andFIG. 14B for the first wafer W. In FIG. 14A, mark ⋄ (KrF2) designatesthe second wafer in the coating process, mark □ (KrF3) the third wafer,and mark Δ (KrF4) designates the fourth wafer in the coating process. InFIG. 14B, mark ⋄ (KrF1) designates the first wafer in the coatingprocess, and mark □ (KrF-av.) designates an average value of data aboutthe second to fourth wafers.

As a result, it was confirmed that the second to fourth wafers W wereprovided with similar profiles, while the profile of the first wafer Wwas different from those of the second to fourth wafers. Nevertheless,it was also confirmed that the film thicknesses of the coating films onthe first to fourth wafers W were together within an allowable rangeabout in-plane uniformity, producing no coating defectiveness.

(Experiment 4)

Using ArF resist as the processing liquid and OK73 thinner as thesolvent, the experiment 4 was performed as similar to the experiment 2.The result is shown in FIG. 15A for the second to fourth wafers W andFIG. 15B for the first wafer W. In FIG. 15A, mark ⋄ (ArF2) designatesthe second wafer in the coating process, mark □ (ArF3) the third wafer,and mark Δ (ArF4) designates the fourth wafer in the coating process. InFIG. 15B, mark ⋄ (ArF1) designates the first wafer in the coatingprocess, and mark □ (ArF-av.) designates an average value of data aboutthe second to fourth wafers.

As a result, it was confirmed that the second to fourth wafers W wereprovided with similar profiles, while the profile of the first wafer Wwas different from those of the second to fourth wafers, as similar tothe Experiment 2. Nevertheless, it was also confirmed that the filmthicknesses of the coating films on the first to fourth wafers W weretogether within an allowable range about in-plane uniformity, producingno coating defectiveness.

According to the present invention, besides the arrangement of thestandby unit 6 on the side face of the cup 3, the standby unit 6 may bearranged in a designated position outside the cup 6 appropriately.Similarly, the solvent nozzle 5 may be disposed in any position of thenozzle unit 4, besides the center position in the shown embodiment.Alternatively, the drain part 62 may be arranged in a position so as notto face the solvent nozzle 5 when making the nozzle unit 4 oppose thestandby unit 6.

If only arranging the drain part 62 on the straight line L passingthrough the rotational center O of a wafer W, the part 62 may beprovided independently of the solvent reservoirs 61A to 61J.Alternatively, the standby unit 6 may be provided with a plurality ofdrain parts. Moreover, the nozzle unit 4 may be constructed so as todischarge the solvent layers 74 through a plurality of processing-liquidnozzles simultaneously.

Further, in view of allowing all or some of the processing-liquidnozzles 4A to 4J to dip their tips into the solvent at a time, thesolvent reservoirs 61A to 61J may be constructed so as to be usable incommon with either all of the nozzles 4A to 4J or some nozzles.

Additionally, the solvent reservoir(s) may be formed so as to allow atwo-step suction of solvent, for example, the first suction where partof the processing-liquid nozzles 4A to 4J (e.g. nozzles 4A to 4E) aredipped into the solvent simultaneously and the second suction where theremaining nozzles are dipped into the solvent simultaneously.

In a modification, the means for sucking the processing-liquid nozzles4A to 4J may be constructed as shown in FIG. 16. In the shownarrangement, opening and closing valves V1 to V10 are interposed in theprocessing-liquid supply passages 42A to 42J for the nozzles 4A to 4J,respectively. The processing-liquid supply passages 42A to 42J areconnected to a common suck-back valve V. In operation, the controller100 controls a sucking force in sucking all of the nozzles 4A to 4J anda sucking force in sucking one nozzle 4A appropriately. When performingto suck all of the nozzles 4A to 4J, all of the valves V1 to V10 areopened by the controller 100. While, when performing to suck the singlenozzle 4A, the relevant valve V 1 is opened by the controller 100. Inthis way, the suck-back operation may be modified fitly. Note, theprocessing-liquid sources 43A to 43J are connected to the downstreamside of the valves V1 to V 10 through the flow control units CA to CJ,respectively.

As a further modification of the invention, when coating a wafer W withthe use of the processing-liquid nozzles 4A to 4J, it may be previouslycarried out to eject a designated amount of processing liquid togetherwith the solvent layer 74. Even in this case, the emissions of theprocessing liquid could be reduced in comparison with that in theconventional case of discharging the dried processing liquid. Further,in this modification, even if the solvent layer 74 is mixed with theprocessing-liquid layer 71, it is possible to avoid an occurrence ofcoating defectiveness.

Besides the coating process of the resist liquid, the present inventionis also applicable to the coating process of another processing liquid,such as SOG/SOD. Additionally, besides the semiconductor wafers W, theinvention is also applicable to a liquid processing for the othersubstrates, such as LCD substrates and mask substrates.

1. A liquid processing method with use of a nozzle unit having aplurality of processing-liquid nozzles arranged integrally and alsoconnected to respective processing-liquid supply passages, for supplyinga surface of a substrate with a processing liquid via one of theprocessing-liquid nozzles, the method comprising the steps of: forming aprocessing-liquid layer, an air layer and a solvent layer in each tip ofthe processing-liquid nozzles of the nozzle unit, in order from the sideof the processing-liquid supply passages; subsequently discharging thesolvent layer from one of the processing-liquid nozzles of the nozzleunit to a drain part; supplying the surface of the substrate with aprocessing liquid through the one processing-liquid nozzle; sucking theprocessing liquid remaining in the one processing-liquid nozzle so as tocause a liquid level of the processing liquid in the oneprocessing-liquid nozzle to retreat toward the processing-liquid supplypassages; dipping the tip of at least the one processing-liquid nozzleof the nozzle unit into a solvent in a solvent reservoir for storing thesolvent of the processing liquid; and sucking the one processing-liquidnozzle so as to cause the liquid level of the processing liquid in theone processing-liquid nozzle to further retreat toward theprocessing-liquid supply passages and also cause the solvent in thesolvent reservoir to be sucked into the tip of the one processing-liquidnozzle, thereby forming a processing-liquid layer, an air layer and asolvent layer in the tip of the one processing-liquid nozzle, in orderfrom the side of the processing-liquid supply passages.
 2. The liquidprocessing method as claimed in claim 1, wherein: the step of supplyingthe surface of the substrate with the processing liquid through the oneprocessing-liquid nozzle is done by supplying the processing liquid tothe substrate during rotating; the plural processing-liquid nozzles ofthe nozzle unit are arranged on a straight line passing through arotational center of the substrate; and the solvent reservoir and thedrain part are arranged on a straight line passing through therotational center of the substrate.
 3. The liquid processing method asclaimed in claim 1, wherein: the step of dipping the tip of at least theone processing-liquid nozzle of the nozzle unit into the solvent is doneby dipping respective tips of the processing-liquid nozzles intorespective solvent reservoirs provided for every processing-liquidnozzles, respectively.
 4. The liquid processing method as claimed inclaim 1, wherein: the step of discharging the solvent layer from the oneprocessing-liquid nozzle is done by moving the processing-liquid nozzlesto a common drain part and subsequently discharging the solvent layerfrom each of the processing-liquid nozzles.
 5. The liquid processingmethod as claimed in claim 1, wherein: the solvent reservoir and thedrain part are arranged in a common container adjacently.
 6. A liquidprocessing method with use of a nozzle unit having a plurality ofprocessing-liquid nozzles arranged integrally and also connected torespective processing-liquid supply passages, for supplying a surface ofa substrate with a processing liquid via one of the processing-liquidnozzles, the method comprising: a first step of forming aprocessing-liquid layer, an air layer and a solvent layer in each tip ofthe processing-liquid nozzles of the nozzle unit, in order from the sideof the processing-liquid supply passages; and a second step of refillingthe solvent layer reduced due to its evaporation after a predeterminedtime has passed since an execution of the first step; wherein the secondstep includes the steps of: discharging the solvent layers from therespective processing-liquid nozzles of the nozzle unit to a drain part;dipping respective tips of the processing-liquid nozzles of the nozzleunit into a solvent in a solvent reservoir for storing the solvent ofthe processing liquid; and sucking the processing-liquid nozzles so asto cause liquid levels of the processing liquids in theprocessing-liquid nozzles to retreat toward the processing-liquid supplypassages and also cause the solvent to be sucked into the tips of theprocessing-liquid nozzles, thereby forming a processing-liquid layer, anair layer and a solvent layer in the each tip of the processing-liquidnozzles, in order from the side of the processing-liquid supplypassages.
 7. The liquid processing method as claimed in claim 6,wherein: the step of supplying the surface of the substrate with theprocessing liquid through the one processing-liquid nozzle is done bysupplying the processing liquid to the substrate during rotating; theplural processing-liquid nozzles of the nozzle unit are arranged on astraight line passing through a rotational center of the substrate; andthe solvent reservoir and the drain part are arranged on a straight linepassing through the rotational center of the substrate.
 8. The liquidprocessing method as claimed in claim 6, wherein: the step of dippingrespective tips of the processing-liquid nozzles of the nozzle unit intothe solvent for the processing liquid is done by dipping the tips of theprocessing-liquid nozzles into respective solvent reservoirs providedfor every processing-liquid nozzles, respectively.
 9. The liquidprocessing method as claimed in claim 6, wherein: the step ofdischarging the solvent layers from the processing-liquid nozzles isdone by moving the processing-liquid nozzles to a common drain part andsubsequently discharging the solvent layers from the processing-liquidnozzles.
 10. The liquid processing method as claimed in claim 6,wherein: the solvent reservoir and the drain part are arranged in acommon container adjacently.
 11. A liquid processing apparatuscomprising: a substrate holder for holding a substrate horizontally; anozzle unit in which a plurality of processing-liquid nozzles areprovided in a common support integrally, the processing-liquid nozzlesbeing connected to respective processing-liquid supply passages to eachsupply the substrate held by the substrate holder with a processingliquid; a solvent reservoir for storing a solvent of the processingliquid, the solvent reservoir being arranged so as to allow either partor all of the processing-liquid nozzles of the nozzle unit to dip tipsthereof into the solvent; a drain part arranged so as to allow part ofthe processing-liquid nozzles of the nozzle unit to discharge theprocessing liquid; suck means for sucking the each processing-liquidnozzles of the nozzle unit; transfer means for transferring the nozzleunit among the solvent reservoir, the drain part and a position tosupply the substrate with the processing liquids; and a controllerincluding a program to control the suck means and the transfer means soas to perform the steps as claimed in claim
 1. 12. The liquid processingapparatus as claimed in claim 11, adapted so as to perform a liquidprocessing while supplying the surface of the substrate rotated by thesubstrate holder with the processing liquid through the singleprocessing-liquid nozzle, wherein: the plural processing-liquid nozzlesof the nozzle unit are arranged on a straight line passing through arotational center of the substrate; and the solvent reservoir and thedrain part are arranged on a straight line passing through therotational center of the substrate.
 13. The liquid processing apparatusas claimed in claim 11, wherein: the nozzle unit further includes asolvent nozzle connected to a solvent supply passage to supply thesubstrate held by the substrate holder with a solvent for the processingliquid.
 14. The liquid processing apparatus as claimed in claim 13,wherein: the plural processing-liquid nozzles and the solvent nozzle aretogether arranged on a straight line passing through the rotationalcenter of the substrate.
 15. The liquid processing apparatus as claimedin claim 11, wherein: the solvent reservoir is provided with respect toeach of the processing-liquid nozzles, correspondingly.
 16. The liquidprocessing apparatus as claimed in claim 11, wherein: the solventreservoir and the drain part are arranged in a common containeradjacently.
 17. The liquid processing apparatus as claimed in claim 16,wherein: the drain part is provided corresponding to the solvent nozzle.18. A liquid processing apparatus comprising: a substrate holder forholding a substrate horizontally; a nozzle unit in which a plurality ofprocessing-liquid nozzles are provided in a common support integrally,the processing-liquid nozzles being connected to respectiveprocessing-liquid supply passages to each supply the substrate held bythe substrate holder with a processing liquid; a solvent reservoir forstoring a solvent of the processing liquid, the solvent reservoir beingarranged so as to allow either part or all of the processing-liquidnozzles of the nozzle unit to dip tips thereof into the solvent; a drainpart arranged so as to allow part of the processing-liquid nozzles ofthe nozzle unit to discharge the processing liquid; suck means forsucking the each processing-liquid nozzles of the nozzle unit; transfermeans for transferring the nozzle unit among the solvent reservoir, thedrain part and a position to supply the substrate with the processingliquids; and a controller including a program to control the suck meansand the transfer means so as to perform the steps as claimed in claim 6.19. The liquid processing apparatus as claimed in claim 18, adapted soas to perform a liquid processing while supplying the surface of thesubstrate rotated by the substrate holder with the processing liquidthrough the single processing-liquid nozzle, wherein: the pluralprocessing-liquid nozzles of the nozzle unit are arranged on a straightline passing through a rotational center of the substrate; and thesolvent reservoir and the drain part are arranged on a straight linepassing through the rotational center of the substrate.
 20. The liquidprocessing apparatus as claimed in claim 18, wherein: the nozzle unitfurther includes a solvent nozzle connected to a solvent supply passageto supply the substrate held by the substrate holder with a solvent forthe processing liquid.
 21. The liquid processing apparatus as claimed inclaim 20, wherein: the plural processing-liquid nozzles and the solventnozzle are together arranged on a straight line passing through therotational center of the substrate.
 22. The liquid processing apparatusas claimed in claim 18, wherein: the solvent reservoir is provided withrespect to each of the processing-liquid nozzles, correspondingly. 23.The liquid processing apparatus as claimed in claim 18, wherein: thesolvent reservoir and the drain part are arranged in a common containeradjacently.
 24. The liquid processing apparatus as claimed in claim 23,wherein: the drain part is provided corresponding to the solvent nozzle.